Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором

The use of computer simulation, design and optimization of power electronic devices formation technological processes can significantly reduce development time, improve the accuracy of calculations, choose the best options for implementation based on strict mathematical analysis. One of the most com...

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Дата:2015
Автори: Baranov, V. V., Borovik, A. M., Lovshenko, I. Yu., Stempitsky, V. R., Trung, Tran Tuan, Shelibak, Ibrahim
Формат: Стаття
Мова:Ukrainian
Опубліковано: PE "Politekhperiodika", Book and Journal Publishers 2015
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Онлайн доступ:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.38
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment
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spelling oai:tkea.com.ua:article-2912025-05-30T19:33:09Z Statistical analysis and optimization of igbt manufacturing flow Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором Baranov, V. V. Borovik, A. M. Lovshenko, I. Yu. Stempitsky, V. R. Trung, Tran Tuan Shelibak, Ibrahim IGBT manufacturing process design optimisation frequency and static characteristics screening experiment биполярный транзистор с изолированным затвором технологический процесс конструкция оптимизация частотные и статические характеристики отсеивающий эксперимент The use of computer simulation, design and optimization of power electronic devices formation technological processes can significantly reduce development time, improve the accuracy of calculations, choose the best options for implementation based on strict mathematical analysis. One of the most common power electronic devices is isolated gate bipolar transistor (IGBT), which combines the advantages of MOSFET and bipolar transistor. The achievement of high requirements for these devices is only possible by optimizing device design and manufacturing process parameters. Therefore, an important and necessary step in the modern cycle of IC design and manufacturing is to carry out the statistical analysis. Procedure of the IGBT threshold voltage optimization was realized. Through screening experiments according to the Plackett – Burman design, the most important input parameters (factors) that have the greatest impact on the output characteristic were detected. The coefficients of the approximation polynomial adequately describing the relationship between the input parameters and investigated output characteristics ware determined. Using the calculated approximation polynomial, a series of multiple, in a cycle of Monte Carlo, calculations to determine the spread of threshold voltage values at selected ranges of input parameters deviation were carried out. Combinations of input process parameters values were determined randomly by a normal distribution within a given range of changes. The procedure of IGBT process parameters optimization consist a mathematical problem of determining the value range of the input significant structural and technological parameters providing the change of the IGBT threshold voltage in a given interval. The presented results demonstrate the effectiveness of the proposed optimization techniques. Реализована процедура оптимизации порогового напряжения биполярного транзистора с изолированным затвором. Посредством проведения отсеивающего эксперимента выявлены наиболее значимые входные параметры. Проведены экспериментальные исследования с использованием метода поверхности откликов для определения разброса значений выходной характеристики посредством анализа в цикле Монте-Карло, а также расчета допустимых отклонений входных параметров, в наибольшей степени влияющих на пороговое напряжение. PE "Politekhperiodika", Book and Journal Publishers 2015-02-24 Article Article Peer-reviewed Article application/pdf https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.38 10.15222/TKEA2015.1.38 Technology and design in electronic equipment; No. 1 (2015): Tekhnologiya i konstruirovanie v elektronnoi apparature; 38-43 Технологія та конструювання в електронній апаратурі; № 1 (2015): Технология и конструирование в электронной аппаратуре; 38-43 3083-6549 3083-6530 uk https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.38/258 Copyright (c) 2015 Baranov V. V., Borovik A. I., Lovshenko I. Yu., Stempitsky V. R., Tran Tuan Trung, Shelibak Ibrahim http://creativecommons.org/licenses/by/4.0/
institution Technology and design in electronic equipment
baseUrl_str
datestamp_date 2025-05-30T19:33:09Z
collection OJS
language Ukrainian
topic биполярный транзистор с изолированным затвором
технологический процесс
конструкция
оптимизация
частотные и статические характеристики
отсеивающий эксперимент
spellingShingle биполярный транзистор с изолированным затвором
технологический процесс
конструкция
оптимизация
частотные и статические характеристики
отсеивающий эксперимент
Baranov, V. V.
Borovik, A. M.
Lovshenko, I. Yu.
Stempitsky, V. R.
Trung, Tran Tuan
Shelibak, Ibrahim
Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
topic_facet IGBT
manufacturing process
design
optimisation
frequency and static characteristics
screening experiment
биполярный транзистор с изолированным затвором
технологический процесс
конструкция
оптимизация
частотные и статические характеристики
отсеивающий эксперимент
format Article
author Baranov, V. V.
Borovik, A. M.
Lovshenko, I. Yu.
Stempitsky, V. R.
Trung, Tran Tuan
Shelibak, Ibrahim
author_facet Baranov, V. V.
Borovik, A. M.
Lovshenko, I. Yu.
Stempitsky, V. R.
Trung, Tran Tuan
Shelibak, Ibrahim
author_sort Baranov, V. V.
title Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
title_short Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
title_full Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
title_fullStr Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
title_full_unstemmed Статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
title_sort статистический анализ и оптимизация параметров тех­нологии изготовления биполярного транзистора с изоли­рованным затвором
title_alt Statistical analysis and optimization of igbt manufacturing flow
description The use of computer simulation, design and optimization of power electronic devices formation technological processes can significantly reduce development time, improve the accuracy of calculations, choose the best options for implementation based on strict mathematical analysis. One of the most common power electronic devices is isolated gate bipolar transistor (IGBT), which combines the advantages of MOSFET and bipolar transistor. The achievement of high requirements for these devices is only possible by optimizing device design and manufacturing process parameters. Therefore, an important and necessary step in the modern cycle of IC design and manufacturing is to carry out the statistical analysis. Procedure of the IGBT threshold voltage optimization was realized. Through screening experiments according to the Plackett – Burman design, the most important input parameters (factors) that have the greatest impact on the output characteristic were detected. The coefficients of the approximation polynomial adequately describing the relationship between the input parameters and investigated output characteristics ware determined. Using the calculated approximation polynomial, a series of multiple, in a cycle of Monte Carlo, calculations to determine the spread of threshold voltage values at selected ranges of input parameters deviation were carried out. Combinations of input process parameters values were determined randomly by a normal distribution within a given range of changes. The procedure of IGBT process parameters optimization consist a mathematical problem of determining the value range of the input significant structural and technological parameters providing the change of the IGBT threshold voltage in a given interval. The presented results demonstrate the effectiveness of the proposed optimization techniques.
publisher PE "Politekhperiodika", Book and Journal Publishers
publishDate 2015
url https://www.tkea.com.ua/index.php/journal/article/view/TKEA2015.1.38
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