Влияние параметров ВЧ-разряда и параметров нагревателя на температуру подложки в плазмохимическом реакторе «Алмаз» для синтеза углеродных алмазоподобных пленок

• Date: 2014
• Main Authors: Hladkovskiy, V. V., Kostin, E. G., Polozov, B. P., Fedorovich, O. A., Petriakov, V. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2014
• Subjects: углеродные алмазоподобные пленки; плазмохимический реактор; подложка; температура нагрева
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.5-6.39
• Journal Title: Technology and design in electronic equipment

The paper presents the research results on the device for obtaining diamond-like films from gas phase, constructed and tested in the Institute for Nuclear Research of the National Academy of Sciences. The device is based on a high-frequency (HF) discharge (13,56 MHz) into controlled crossed magnetic...