Получение, свойства и применение тонких нанонеоднородных пленок Ge на GaAs-подложках

• Date: 2014
• Main Authors: Venger, E. F., Lytvyn, P. M., Matveeva, L. A., Mitin, V. F., Kholevchuk, V. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2014
• Subjects: пленки германия; скорость роста; морфология поверхности; электронные и оптические свойства; внутренние механические напряжения
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.4.39
• Journal Title: Technology and design in electronic equipment

Ge thin films condensation in vacuum onto semiinsulating GaAs(100) substrates was investigated. The methods of atomic-force microscopy, optical spectroscopy, measurement of intrinsic mechanical stresses in film, and electronic properties were used for this investigation. It was found that it is poss...