Ионизационный отжиг полупроводниковых кристаллов. Часть первая: Теоретические пред­по­сы­л­ки

• Datum: 2014
• Hauptverfasser: Garkavenko, A. S., Mokritskii, V. A., Banzak, O. V., Zavadskii, V. A.
• Format: Artikel
• Sprache: Ukrainian
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2014
• Schlagworte: лазер; отжиг; электронный пучок
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.4.50
• Назва журналу: Technology and design in electronic equipment

During irradiation of semiconductor crystals with powerful (high current) pulsed high-energy electron beams, a new type of annealing has been obtained. We could obtain new results and to find out physical nature of this phenomenon due to short and powerful bunches of electrons with high energy. Give...