Ионизационный отжиг полупроводниковых кристаллов. Часть первая: Теоретические пред­по­сы­л­ки

Ионизационный отжиг полупроводниковых кристаллов. Часть первая: Теоретические пред­по­сы­л­ки

During irradiation of semiconductor crystals with powerful (high current) pulsed high-energy electron beams, a new type of annealing has been obtained. We could obtain new results and to find out physical nature of this phenomenon due to short and powerful bunches of electrons with high energy. Give...

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Bibliographic Details
Date:2014
Main Authors: Garkavenko, A. S., Mokritskii, V. A., Banzak, O. V., Zavadskii, V. A.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2014
Subjects:
лазер
отжиг
электронный пучок
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.4.50
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment

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https://www.tkea.com.ua/index.php/journal/article/view/TKEA2014.4.50

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