Источник бескапельных плазменных потоков для наноэлек­троники

• Datum: 2013
• 1. Verfasser: Borisenko, A. G.
• Format: Artikel
• Sprache: Ukrainisch
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2013
• Schlagworte: вакуум; дуговой разряд; анод; наноструктура
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.4.37
• Назва журналу: Technology and design in electronic equipment

The paper describes the source of solid-phase materials plasma flow generated by vacuum-arc discharge in vapours of diffuse evaporated anode. The source can efficiently create macroparticle-free plasma flows of various metals in vacuum, and provided the vacuum chamber is filled with required working...