Источник бескапельных плазменных потоков для наноэлектроники
The paper describes the source of solid-phase materials plasma flow generated by vacuum-arc discharge in vapours of diffuse evaporated anode. The source can efficiently create macroparticle-free plasma flows of various metals in vacuum, and provided the vacuum chamber is filled with required working...
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| Date: | 2013 |
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| Main Author: | |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2013
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.4.37 |
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| Journal Title: | Technology and design in electronic equipment |