Источник бескапельных плазменных потоков для наноэлек­троники

• Date: 2013
• Main Author: Borisenko, A. G.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2013
• Subjects: вакуум; дуговой разряд; анод; наноструктура
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.4.37
• Journal Title: Technology and design in electronic equipment

The paper describes the source of solid-phase materials plasma flow generated by vacuum-arc discharge in vapours of diffuse evaporated anode. The source can efficiently create macroparticle-free plasma flows of various metals in vacuum, and provided the vacuum chamber is filled with required working...