Метод жидкофазной эпитаксии толстых слоев

• Date: 2013
• Main Authors: Dranchuk, S. N., Zavadskiy, V. A., Mokritskiy, V. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2013
• Subjects: эпитаксия; раствор-расплав; диффузия; слой; концентрация
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.2-3.58
• Journal Title: Technology and design in electronic equipment

On the basis of the authors' model of mass transfer, a new method for thick layers epitaxy has been developed. The method provides for the growth of different parts of the layers in two-layer systems obtained from the solution-melt and allows to control the thickness of substrate submelting and...