Технология изготовления контактов к карбиду кремния

• Datum: 2013
• Hauptverfasser: Kudryk, Ya. Ya., Bigun, R. I., Kudryk, R. Ya.
• Format: Artikel
• Sprache: Ukrainisch
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2013
• Schlagworte: омический контакт; SiC; удельное сопротивление
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.1.25
• Назва журналу: Technology and design in electronic equipment

The authors classified the results of investigations of resistivity of ohmic contacts to silicon carbide made without any semiconductor surface modification. A set of contacts with better parameters were analysed. From the results of this analysis, some recommendations were made concerning optimal c...