Массоперенос при жидкофазной эпитаксии двухслойных систем

• Date: 2012
• Main Authors: Dranchuk, S. M., Zavadzkii, V. A., Mokritskii, V. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2012
• Subjects: эпитаксия; массоперенос; диффузия; раствор-расплав; подложка; режим; слои; температура
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.5.48
• Journal Title: Technology and design in electronic equipment

A liquid phase epitaxy diffusion model of a two-layer system at instable cooling speed of the solution-melt has been developed. It was discovered that the transition process continues even after the termination of cooling, due to which the layer growth continues as well. This effect is connected wit...