Система искусственного интеллекта для технической диагностики фотошаблонов

The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result, it will allow to ma...

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Bibliographic Details
Date:2012
Main Authors: Kozina, Yu. Yu., Kozin, А. А.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2012
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Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.1.07
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment