Система искусственного интеллекта для технической диагностики фотошаблонов

• Date: 2012
• Main Authors: Kozina, Yu. Yu., Kozin, А. А.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2012
• Subjects: фотошаблон; система искусственного интеллекта; техническая диагностика; реперные знаки
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.1.07
• Journal Title: Technology and design in electronic equipment

The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result, it will allow to ma...