Формирование дельта-легированного водородом p-слоя в природных и CVD-кристаллах алмаза

• Datum: 2011
• Hauptverfasser: Altukhov, A. A., Afanas’ev, M. S., Zyabliuk, K. N., Mityagin, A. Yu., Talipov, N. H., Chucheva, G. V.
• Format: Artikel
• Sprache: Ukrainisch
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2011
• Schlagworte: алмаз; гидрогенизация; СВЧ-транзисторы; барьеры Шоттки
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.5.14
• Назва журналу: Technology and design in electronic equipment

A method is proposed for the hydrogen heat treatment of natural and CVD-diamond crystals, which can serve as an alternative to conventional method of forming H-layer in microwave plasma of hydrogen as a simpler one and more reproducible. The boundaries of thermal stability of hydrogenated diamond su...