Формирование дельта-легированного водородом p-слоя в природных и CVD-кристаллах алмаза

• Date: 2011
• Main Authors: Altukhov, A. A., Afanas’ev, M. S., Zyabliuk, K. N., Mityagin, A. Yu., Talipov, N. H., Chucheva, G. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2011
• Subjects: алмаз; гидрогенизация; СВЧ-транзисторы; барьеры Шоттки
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.5.14
• Journal Title: Technology and design in electronic equipment

A method is proposed for the hydrogen heat treatment of natural and CVD-diamond crystals, which can serve as an alternative to conventional method of forming H-layer in microwave plasma of hydrogen as a simpler one and more reproducible. The boundaries of thermal stability of hydrogenated diamond su...