Формирование дельта-легированного водородом p-слоя в природных и CVD-кристаллах алмаза
A method is proposed for the hydrogen heat treatment of natural and CVD-diamond crystals, which can serve as an alternative to conventional method of forming H-layer in microwave plasma of hydrogen as a simpler one and more reproducible. The boundaries of thermal stability of hydrogenated diamond su...
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| Datum: | 2011 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Ukrainian |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2011
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.5.14 |
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| Назва журналу: | Technology and design in electronic equipment |