Влияние слоя поликристаллического кремния на механизмы токопереноса в контактах «металл — p-кремний»

• Date: 2011
• Main Authors: Smyntyna, V. A., Kulinich, О. А., Yatsunskii, I. R., Sviridova, O. V., Marchuk, I. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2011
• Subjects: поликристаллический кремний; токоперенос; контакт «металл — p-кремний»
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.5.39
• Journal Title: Technology and design in electronic equipment

Based on the results of investigations of charge transport in the "metal — p-Si" contacts with different thickness of polycrystalline p-Si layer the mechanisms of charge transport through such structures are shown. It is established that with increasing thickness of the l...