Оборудование для формирования омических контактов полупроводниковых приборов на ос­но­ве соединений A3B5

Technological process features of ohmic contacts formation in semiconductor devices based on А3В5 connections and the general principles of technological modules construction are considered. The results received by means of installations of an electron-beam evaporation of STE EB series and...

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Bibliographische Detailangaben
Datum:2011
Hauptverfasser: Aleksandrov, S. B., Krupal'nik, K. M, Kornilov, N. O., Kondratyeva, T. A.
Format: Artikel
Sprache:Ukrainian
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2011
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Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.1-2.49
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment