Оборудование для формирования омических контактов полупроводниковых приборов на ос­но­ве соединений A3B5

• Date: 2011
• Main Authors: Aleksandrov, S. B., Krupal'nik, K. M, Kornilov, N. O., Kondratyeva, T. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2011
• Subjects: полупроводниковые приборы; омические контакты; электронно-лучевое напыление
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.1-2.49
• Journal Title: Technology and design in electronic equipment

Technological process features of ohmic contacts formation in semiconductor devices based on А3В5 connections and the general principles of technological modules construction are considered. The results received by means of installations of an electron-beam evaporation of STE EB series and...