Оборудование для формирования омических контактов полупроводниковых приборов на основе соединений A3B5
Technological process features of ohmic contacts formation in semiconductor devices based on А3В5 connections and the general principles of technological modules construction are considered. The results received by means of installations of an electron-beam evaporation of STE EB series and...
Saved in:
| Date: | 2011 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2011
|
| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.1-2.49 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Technology and design in electronic equipment |