Радиационная технология улучшения омических контактов к элементам электронной техники

Two types of metallization (Au, Ti) to a fullerene-bearing material are investigated. The advantages of microwave annealing are noted. Microwave annealing of polymer-fullerene layers with both metallizations is studied; the resistance decreases in both cases. The titanium metallization seems to be m...

Повний опис

Збережено в:
Бібліографічні деталі
Дата:2010
Автори: Konakova, R. V., Kolyadina, Е. Yu., Matveeva, L. А., Nelyuba, P. L., Shynkarenko, V. V.
Формат: Стаття
Мова:Ukrainian
Опубліковано: PE "Politekhperiodika", Book and Journal Publishers 2010
Теми:
Онлайн доступ:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.40
Теги: Додати тег
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment
Опис
Резюме:Two types of metallization (Au, Ti) to a fullerene-bearing material are investigated. The advantages of microwave annealing are noted. Microwave annealing of polymer-fullerene layers with both metallizations is studied; the resistance decreases in both cases. The titanium metallization seems to be more promising than the gold one. The mechanisms responsible for titanium metallization quality are presented.