Радиационная технология улучшения омических контактов к элементам электронной техники

• Date: 2010
• Main Authors: Konakova, R. V., Kolyadina, Е. Yu., Matveeva, L. А., Nelyuba, P. L., Shynkarenko, V. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2010
• Subjects: фуллереновые пленки; металлизация; микроволновый отжиг
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.40
• Journal Title: Technology and design in electronic equipment

Two types of metallization (Au, Ti) to a fullerene-bearing material are investigated. The advantages of microwave annealing are noted. Microwave annealing of polymer-fullerene layers with both metallizations is studied; the resistance decreases in both cases. The titanium metallization seems to be m...