Электрические и топологические свойства пленок оксидов, термически выращенных на подложках InSe

• Date: 2010
• Main Authors: Katerynchuk, V. M., Kovaluk, Z. D., Khomiak, V. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2010
• Subjects: InSe; термическое окисление; поверхностное сопротивление; атомно-силовая микроскопия; поверхностная топология
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.51
• Journal Title: Technology and design in electronic equipment

The surface resistance dynamics of oxides grown thermally on InSe substrates in two crystallography planes is obtained. It is determined that resistance changes considerably only during the first 5 minutes of the oxidization period. The increase of an oxidization duration does not influence on its v...