Свойства и практическое применение нанокристаллических пленок оксида церия
The properties of CeOx films produced by various methods have been investigated. According to the comparative analisys “metallic mirror oxidation” method allows producing films with significantly better characteristics than the «explosive evaporation» method. Though, the latter method yields higher...
Збережено в:
| Дата: | 2010 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | Ukrainian |
| Опубліковано: |
PE "Politekhperiodika", Book and Journal Publishers
2010
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| Теми: | |
| Онлайн доступ: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.54 |
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| Назва журналу: | Technology and design in electronic equipment |
Репозитарії
Technology and design in electronic equipment| Резюме: | The properties of CeOx films produced by various methods have been investigated. According to the comparative analisys “metallic mirror oxidation” method allows producing films with significantly better characteristics than the «explosive evaporation» method. Though, the latter method yields higher photosensitivity of CeOx films and structures on their base. In the process, the optimal value of the substrate temperature was determined. Obtained data expand the CeOx application potential in microelectronic sensor sphere. |
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