Свойства металлических контактов на пленках TiO2, изготовленных методом реактивного магнетронного распыления

• Date: 2010
• Main Authors: Brus, V. V., Kovaluk, Z. D., Maryanchuk, P. D., Orletsky, I. G., Maystruk, E. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2010
• Subjects: диоксид титана; пленки; магнетронное распыление
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.60
• Journal Title: Technology and design in electronic equipment

The article deals with research on volt-ampere characteristics of metal contacts (Al, Cr, In, Mo, Ti) on titanium dioxide thin films and influence of annealing in vacuum on their electric properties. Volt-ampere characteristics measurements were taken by three-probe method. There was established tha...