Широкоапертурный высокочастотный источник ионов низкой энергии с электронной компенсацией

• Date: 2010
• Main Authors: Dudin, S. V., Rafalskyi, D. V., Zykov, A. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2010
• Subjects: источник ионов; ВЧ индукционный разряд; ионно-оптическая система; компенсация пучка ионов
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.2.52
• Journal Title: Technology and design in electronic equipment

Characteristics of single-grid RF ion source with 250 mm beam diameter and 1A beam current have been studied. Energy distribution functions of electrons and ions emitted by the source have been measured. It is shown that the emitted electron current is sufficient for full ion beam current compensati...