Газочувствительные элементы на основе пленок SiPcCl2
Influence of technological parameters (reception conditions, heat treatment and thickness) on electric and sensing properties of SiPcCl2 films is analysed. The films are received by a evaporating method. High sensitivity to oxides of nitrogen is shown. Electric and sensing properties are compared at...
Saved in:
| Date: | 2010 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2010
|
| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.2.58 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Technology and design in electronic equipment |
Institution
Technology and design in electronic equipment| Summary: | Influence of technological parameters (reception conditions, heat treatment and thickness) on electric and sensing properties of SiPcCl2 films is analysed. The films are received by a evaporating method. High sensitivity to oxides of nitrogen is shown. Electric and sensing properties are compared at gas and temperatures influences. Temperature limits of work are determined. Small response and desorption times with high sensitivity allow using structures with silicon phthalocyanine films in gasosensors. |
|---|