Закономерности формирования пучка ионов низкой энергии при помощи односеточной ионно-оптической системы
The experimental investigations of principles of low energy ion beam formation in single-grid ion optical system with ICP discharge are reported. Two modes of ions extraction are discovered: beam regime and plasma regime with transition at some critical potential of inductively coupled plasma. Numer...
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| Datum: | 2009 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Ukrainian |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2009
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.6.42 |
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| Назва журналу: | Technology and design in electronic equipment |