Оптимизация конструкции мембранных датчиков

The possibility of reducing the power consumed by the gas concentration sensor through the introduction of cracks in the structure of the multi-layered membrane has been considered. The conduction of etching of the peaks of pores in concentrated orthophosphoric acid for increasing of the effected ar...

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Bibliographic Details
Date:2009
Main Authors: Rubcevich, I. I., Wysotsky, V. B., Kovalchuk, N. S.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2009
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Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.16
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment
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Summary:The possibility of reducing the power consumed by the gas concentration sensor through the introduction of cracks in the structure of the multi-layered membrane has been considered. The conduction of etching of the peaks of pores in concentrated orthophosphoric acid for increasing of the effected area of contact of platinum with sub layer of porous aluminium has been suggested.