Первичные преобразователи для микродатчиков ускорения и давления на алмазных материалах
The article presents the design, manufacturing techniques and the scheme of parameter measuring of primary transducers for acceleration and pressure microsensors based on diamond materials. There have been described the designing procedure and an experimental way of definition of microsensors'...
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| Datum: | 2009 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Ukrainian |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2009
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.4.27 |
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| Назва журналу: | Technology and design in electronic equipment |
Institution
Technology and design in electronic equipment| Zusammenfassung: | The article presents the design, manufacturing techniques and the scheme of parameter measuring of primary transducers for acceleration and pressure microsensors based on diamond materials. There have been described the designing procedure and an experimental way of definition of microsensors' key parameters. The calculated value of capacity 11 pF for primary transducers of the gauge of acceleration, well coincides with experimental values. The working range of accelerations from 100 to 1800 m/s2, thus capacity almost linearly varies in a range 11—20,5 pF. For primary transducers of the pressure sensor the calculated value of capacity 7 pF, also well coincides with experimental values. The working range of pressure measurements from 1 to 19,5 kPa, thus capacity almost linearly varies in a range 6,4—11,7 pF. |
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