Пер­вич­ные пре­об­ра­зо­ва­те­ли для ми­кро­дат­чи­ков ус­ко­ре­ния и дав­ле­ния на ал­маз­ных ма­те­ри­а­лах

• Date: 2009
• Main Authors: Altuchov, A. A., Mityagin, A. Yu., Moguchev, A. V., Mityagina, A. B.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: первичный преобразователь; микродатчик; давление; ускорение; алмазный материал
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.4.27
• Journal Title: Technology and design in electronic equipment

The article presents the design, manufacturing techniques and the scheme of parameter measuring of primary transducers for acceleration and pressure microsensors based on diamond materials. There have been described the designing procedure and an experimental way of definition of microsensors'...