Новий підхід до підвищення чутливості газового сенсора на основі плівок нанокристалічного карбіду кремнію
It was shown the possibility of increasing the sensitivity of a gas sensor based on nanocrystalline SiC films by using a scheme of a two-component sensing element, one of which is an n-nc-SiC film with electronic conductivity, and the second is an p-nc-SiC film with hole conductivity. It is shown th...
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| Date: | 2021 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2021
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2021.5-6.11 |
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| Journal Title: | Technology and design in electronic equipment |