Ме­тод счи­ты­ва­ния и об­ра­бот­ки ста­ци­о­нар­ных ин­тер­фе­ре­н­ци­он­ных кар­тин

The optoelectronic reading system enables real-time acquisition and processing of interference pattern images in the Kesterse interferometer with sufficient resolution. The root-mean-square deviation of the measurement results is 0.001 mm. The total time required for measurement and analysis has bee...

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Bibliographische Detailangaben
Datum:2009
Hauptverfasser: Ilyin, V. N., Dubeshko, A. V., Mihaevich, D. A.
Format: Artikel
Sprache:Ukrainian
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2009
Schlagworte:
Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.4.59
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment