Прибор и методы измерения параметров и степени однородности пленочных структур
A design and technological analysis of the scheme for measuring ellipsometric parameters, calculating the refractive index and film thickness has been carried out. A block diagram has been developed and a prototype instrument has been created for monitoring the degree of uniformity of film structure...
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| Date: | 2009 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2009
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.3.40 |
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| Journal Title: | Technology and design in electronic equipment |