Прибор и методы измерения параметров и степени однородности пленочных структур

• Date: 2009
• Main Authors: Makara, V. A., Odarych, V. A., Kepich, T. Yu., Preobragenskaya, T. D., Rudenko, O. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: эллипсометрия; методы измерения параметров пленок; контроль однородности
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.3.40
• Journal Title: Technology and design in electronic equipment

A design and technological analysis of the scheme for measuring ellipsometric parameters, calculating the refractive index and film thickness has been carried out. A block diagram has been developed and a prototype instrument has been created for monitoring the degree of uniformity of film structure...