Прибор и методы измерения параметров и степени однородности пленочных структур

• Datum: 2009
• Hauptverfasser: Makara, V. A., Odarych, V. A., Kepich, T. Yu., Preobragenskaya, T. D., Rudenko, O. V.
• Format: Artikel
• Sprache: Ukrainian
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2009
• Schlagworte: эллипсометрия; методы измерения параметров пленок; контроль однородности
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.3.40
• Назва журналу: Technology and design in electronic equipment

A design and technological analysis of the scheme for measuring ellipsometric parameters, calculating the refractive index and film thickness has been carried out. A block diagram has been developed and a prototype instrument has been created for monitoring the degree of uniformity of film structure...