Электроосаждение конформных электродов для получения туннельного перехода с вакуумным нанозазором
Electrodeposition of a copper electrode on a Si substrate is performed to obtain a large-area vacuum nanogap for thermotunneling devices. To obtain the correct geometry of such an electrode and reduce internal stress in it, cathode rotation, various protective masks, asymmetric current mode, and ele...
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| Date: | 2009 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2009
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.2.37 |
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| Journal Title: | Technology and design in electronic equipment |