Изменение свойств пленок кремнийорганических стекол после термической и плазмохимической обработок

• Date: 2009
• Main Authors: Ivanchykau, A. E., Kisel, A. M., Medvedeva, A. B, Plebanovich, V. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: струкрура пленки; скорость травления; спектр пропускания
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.2.46
• Journal Title: Technology and design in electronic equipment

It has been established that the quality of the film after various technological operations in the manufacture of ICs can be assessed by changes in the film's transmission spectrum. This makes it possible to eliminate IC defects caused by metal layer breakage.