Электропроводящие тонкие пленки для BaCuTeF прозрачных контактов в полупроводниковой электронике
The chemical composition, structural properties, and electrophysical parameters of BaCuTeF thin films have been investigated. The dependence of the amount of excess copper on the parameters of the deposition process has been studied. The addition of excess copper leads to an increase in film conduc...
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| Datum: | 2008 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Ukrainian |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2008
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.6.54 |
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| Назва журналу: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Zusammenfassung: | The chemical composition, structural properties, and electrophysical parameters of BaCuTeF thin films have been investigated. The dependence of the amount of excess copper on the parameters of the deposition process has been studied. The addition of excess copper leads to an increase in film conductivity due to enhanced hole mobility. BaCuTeF thin films can be used for the fabrication of transparent p++ contacts to semiconductor electronic devices.
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