Электропроводящие тонкие пленки для BaCuTeF прозрачных контактов в полупроводниковой электронике
The chemical composition, structural properties, and electrophysical parameters of BaCuTeF thin films have been investigated. The dependence of the amount of excess copper on the parameters of the deposition process has been studied. The addition of excess copper leads to an increase in film conduc...
Saved in:
| Date: | 2008 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2008
|
| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.6.54 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Technology and design in electronic equipment |