Электропроводящие тонкие пленки для BaCuTeF прозрачных контактов в полупроводниковой электронике

• Date: 2008
• Main Authors: Hotra, Z. Yu., Tate, J., Kykyneshi, R., Zakutayev, А. А., Rakobovchuk, L. M.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2008
• Subjects: BaCuTeF; прозрачные полупроводники р-типа; p -контакты
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.6.54
• Journal Title: Technology and design in electronic equipment

The chemical composition, structural properties, and electrophysical parameters of BaCuTeF thin films have been investigated. The dependence of the amount of excess copper on the parameters of the deposition process has been studied. The addition of excess copper leads to an increase in film conduc...