Испаритель для термического напыления материалов в вакууме

• Date: 2008
• Main Authors: Bosyi, V. I., Kokhan, V. P., Rakhmanov, N. M.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2008
• Subjects: напыление; испаритель; ленточный нагреватель; тигель; распределение температуры
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.5.56
• Journal Title: Technology and design in electronic equipment

The design of an evaporator intended for material deposition in vacuum-coating systems is considered, which has been successfully employed in the technological process of fabricating gallium arsenide transistors, diodes, and monolithic circuits.