Получение полуизолирующего кремния для высоковольтных приборов
The influence of deposition conditions on the nucleation process, structure, and electrophysical properties of oxygen‑doped polycrystalline silicon (ODPS) films has been investigated. At an oxygen content of 2.5–22.0 at.%, ODPS exhibits a quasi‑crystalline structure. The density of ODPS across the e...
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| Date: | 2008 |
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| Main Author: | |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2008
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.1.35 |
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| Journal Title: | Technology and design in electronic equipment |