Методы удаления дефектов, возникающих при жидкостном травлении поверхности поликристаллического кремния
A model of defect formation in the form of spots on the surface of polycrystalline silicon during the processing of semiconductor wafers in an etchant based on hydrofluoric acid is considered, as well as a model of defect removal in chemical solutions. The influence of centrifuge rotation speed duri...
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| Date: | 2008 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2008
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.1.42 |
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| Journal Title: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Summary: | A model of defect formation in the form of spots on the surface of polycrystalline silicon during the processing of semiconductor wafers in an etchant based on hydrofluoric acid is considered, as well as a model of defect removal in chemical solutions. The influence of centrifuge rotation speed during drying and the relief of structures created on the wafer on the number of defects has been investigated. The possibility of defect removal by chemical treatment in peroxide–ammonia solutions (PAS), or by a sequence of chemical cleaning operations in a Caro’s mixture and PAS, as well as by SiO₂ etching, has been demonstrated. |
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