Первичные преобразователи давления криогенных жидкостей
A universal design of strain-gauge pressure transducers for measuring the pressure of cryogenic liquids is proposed. The transducers are based on p-type silicon whiskers with different boron concentrations, mounted on invar elastic elements (beams), and operate in the strain range ε = ±1.2·10⁻³ and...
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| Date: | 2007 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.6.30 |
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| Journal Title: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Summary: | A universal design of strain-gauge pressure transducers for measuring the pressure of cryogenic liquids is proposed. The transducers are based on p-type silicon whiskers with different boron concentrations, mounted on invar elastic elements (beams), and operate in the strain range ε = ±1.2·10⁻³ and temperature range 4.2–300 K. The possibility of developing pressure transducers for liquid nitrogen and liquid helium using the classical piezoresistive effect is demonstrated, as well as achieving a significant increase in sensitivity through the non-classical piezoresistive effect near the metal–insulator transition. Examples of developed pressure transducers for cryogenic liquids are presented.
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