Формирование наноструктурированных пленок иридия и поликластерного алмаза

• Datum: 2007
• Hauptverfasser: Belyanin, A. F., Pal', A. F., Samoylovich, M. I., Suetin, N. V., Dzbanovskiy, N. N., Mitin, V. S., Pashchenko, P. V., Timofeev, M. A.
• Format: Artikel
• Sprache: Ukrainisch
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2007
• Schlagworte: наноструктурированные пленки иридия и алмаза; магнетронное распыление; СВЧ-разряд; микроэлектроника
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.6.50
• Назва журналу: Technology and design in electronic equipment

Iridium films and layered “iridium–diamond” structures were formed on Al₂O₃, MgO, and SrTiO₃ substrates. Iridium films were deposited by magnetron sputtering, while polycluster diamond films were obtained using the microwave discharge method. The structure of iridium and diamond films was studied a...