Тонкопленочные элементы кремниевых диодов Шоттки для высокотемпературного микромонтажа

The design and technological features of silicon Schottky diodes assembled in glass packages, as well as their electrical properties, are discussed. These devices require thermal stability of the chips up to 650 °C. It is shown that a V/n-Si Schottky barrier with a height of 0.654 V meets these tech...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Datum:2007
Hauptverfasser: Baranov, V. V., Solovyev, Ya. A., Koshkarov, G. V.
Format: Artikel
Sprache:Ukrainisch
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2007
Schlagworte:
Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.5.20
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:Technology and design in electronic equipment

Institution

Technology and design in electronic equipment
Beschreibung
Zusammenfassung:The design and technological features of silicon Schottky diodes assembled in glass packages, as well as their electrical properties, are discussed. These devices require thermal stability of the chips up to 650 °C. It is shown that a V/n-Si Schottky barrier with a height of 0.654 V meets these technological requirements. The presence of vanadium disilicide in the transition layer, formed during the micro-packaging process, has been established. It is also recommended to use a double-layer passivation structure of SiO2/Ta2O5.