Направленная кристаллизация силицидных пленок на кремниевой подложке
The processes of local nucleation and subsequent directed lateral crystallization of cobalt silicide phase on the surface of monocrystalline silicon have been investigated. The possibilities of creating self-organized submicron and nanoscale elements of silicon integrated circuits are considered.
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| Date: | 2007 |
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| Main Author: | |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.5.54 |
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| Journal Title: | Technology and design in electronic equipment |