Направленная кристаллизация силицидных пленок на кремниевой подложке

• Date: 2007
• Main Author: Belousov, I. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2007
• Subjects: самоформирующиеся структуры; латеральный рост; локальное зарождение; силицидная фаза; интегральная схема
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.5.54
• Journal Title: Technology and design in electronic equipment

The processes of local nucleation and subsequent directed lateral crystallization of cobalt silicide phase on the surface of monocrystalline silicon have been investigated. The possibilities of creating self-organized submicron and nanoscale elements of silicon integrated circuits are considered.