Aвтоматизированный спектрометр глубоких уровней для исследования полупроводниковых структур
An automated spectrometer for investigating the parameters of impurity and defect centers in semiconductors and semiconductor structures using deep-level transient spectroscopy is described. A developed software package for control and data processing enables automation of measurement procedures and...
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| Datum: | 2007 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.3.59 |
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| Назва журналу: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Zusammenfassung: | An automated spectrometer for investigating the parameters of impurity and defect centers in semiconductors and semiconductor structures using deep-level transient spectroscopy is described. A developed software package for control and data processing enables automation of measurement procedures and increases the accuracy of the obtained results. |
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