Aвтоматизированный спектрометр глубоких уровней для исследования полупроводниковых структур

• Date: 2007
• Main Authors: Boiko, Yu. V., Kuznetsov, G. V., Savitsky, S. М., Tretyak, O. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2007
• Subjects: релаксационный спектрометр; глубокие уровни; примесные и дефектные центры
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.3.59
• Journal Title: Technology and design in electronic equipment

An automated spectrometer for investigating the parameters of impurity and defect centers in semiconductors and semiconductor structures using deep-level transient spectroscopy is described. A developed software package for control and data processing enables automation of measurement procedures and...