Технологии изготовления фотонных кристаллов
A review of methods for fabricating photonic crystals for nanophotonic integrated circuits is presented. A comparative analysis of existing technologies has been carried out. The prospects of applying these technologies under industrial production conditions of devices based on photonic crystals are...
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| Date: | 2007 |
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| Main Author: | |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.1.45 |
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| Journal Title: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Summary: | A review of methods for fabricating photonic crystals for nanophotonic integrated circuits is presented. A comparative analysis of existing technologies has been carried out. The prospects of applying these technologies under industrial production conditions of devices based on photonic crystals are considered. Conclusions are drawn regarding the use of methods in various industrial environments. |
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